By Ivor Brodie
The actual Electronics division of SRI foreign (formerly Stanford study Institute) has been pioneering the improvement of units fabricated to submicron tolerances for good over two decades. In 1961, a landmark paper on electron-beam lithography and its linked applied sciences was once released by way of ok. R. Shoulderst (then at SRI), which set the level for our next efforts during this box. He had the foresight to think that the development of such small units was once really in the variety of human functions. due to this preliminary momentum, our adventure within the applied sciences linked to microfabrication has develop into remarkably entire, regardless of the really small measurement of our learn task. now we have often been requested to carry seminars or supply stories on quite a few features of micro fabrication. those actions made us conscious of the necessity for a entire evaluation of the physics of microfabrication. we are hoping that this ebook will fill that need.