Download PDF by S. M. Rossnagel (auth.), Orlando Auciello, Jürgen Engemann: Multicomponent and Multilayered Thin Films for Advanced

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By S. M. Rossnagel (auth.), Orlando Auciello, Jürgen Engemann (eds.)

The synthesis of multicomponent/multilayered superconducting, carrying out, semiconducting and insulating skinny movies has turn into the topic of a radical, world wide, interdisciplinary study attempt. the improvement of deposition-characterization suggestions and the technology and expertise concerning the synthesis of those motion pictures are severe for the winning evolution of this interdisciplinary box of analysis and the implementation of the hot fabrics in a complete new new release of complex microdevices.
This ebook includes the lectures and contributed papers on a variety of clinical and technological facets of multicomponent and multilayered skinny movies provided at a NATO/ASI. in comparison to different fresh books on skinny movies, the specified personality of this ebook is the interdisciplinary therapy of some of the fields of study on the topic of the various skinny movie fabrics pointed out above. the wide variety of issues mentioned during this ebook comprise vacuum-deposition innovations, synthesis-processing, characterization, and units of multicomponent/multilayered oxide hot temperature superconducting, ferroelectric, electro-optic, optical, metal, silicide, and compound semiconductor skinny films.
The ebook provides an strange intedisciplinary alternate of rules among researchers with cross-disciplinary backgrounds and it'll be valuable to validated investigators in addition to postdoctoral and graduate students.

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Extra info for Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices

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J: 6 e 3 ~ 0 15 t:l 0 10 90 ·90 8 6 4 2 - o Ar_ ·90 Figure 14. , target-substrate distance: 150 mm) (after Theirich [28]). - .... 160X (NT1) 9=30° CI) 'E :;, lIS '3 E 0 '-' c 3 2 0 ;:: CIl 0 a. 1 E 0 0 ~ 0 ·20 0 20 40 60 80 100 t'} [deg] Figure 15. 1 mA/cm 2 ) (after Marszalek et al. [29]). 65 YBaCuO) target compositions with E> and e varying from 15· to 60· (in 15" steps) and -55" to lOS- have been used, respectively. The resulting YBaCuO thin films were analyzed by energy dispersive x-ray spectroscopy (EDX) and Rutherford backscattering spectroscopy (RBS).

Tokuyama, Elsevier, Amsterdam, New York, Oxford, Tokyo (1989). RS. Technol. 16 (1979)185. T. Tokuyama, K. Yagi, K. Miyake, M. Tamura, N. Natsuaki, and S. Instrum. , 182/183 (I) (April/May 1981) 241. R. A. S. Noggle, N. J. D. /March 1987) 52. H. Frey and G. ) "Dunnschichttechnologie", VDI-Verlag, Dusseldorf (1987) 228. P. G. Meth. 174 (1980) 257. J. Bansky, J. Engemann, D. M. /USA, Oct 21-23, 1991. D. Korzec, 1. Engemann, J. M. Techno!. B8 (1990) 1716. Theirich, "lonenstrahldeposition mehrphasiger, mehrkomponentiger Metalltargets", PhD-Thesis, University of Wuppertal (1991).

In this mode the extraction optic is biased such that the plasma source operates sequentially as a broad beam electron and ion emitter [18J. 600 V Vace + - 20% of Vscr+ Electron extraction Vscr- = -50 .... -200 V Vace- = 0 (grounded) The extraction of ions and electrons is switched with a frequency f = 1IT according to Fig. 8. s) T Figure 8. Pulsed ion beam neutralization. (a) Time-dependent screen-grid, accelerator-grid and target potentials. (b) Electron- and ion-induced target currents during pulsed particle extraction (after Korzec et a1.

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